Deepak Doddabelavangala Srikantaiah. ENHANCING THE PERFORMANCE OF SEMICONDUCTOR EQUIPMENT BY PREVENTING BYPRODUCT BUILDUP IN ETCH PROCESS CHAMBER. IJCET. 2024;15(6):2096-2101. Accessed April 17, 2026. https://openlibindex.com/index.php/IJCET/article/view/1676