DEEPAK DODDABELAVANGALA SRIKANTAIAH. ENHANCING THE PERFORMANCE OF SEMICONDUCTOR EQUIPMENT BY PREVENTING BYPRODUCT BUILDUP IN ETCH PROCESS CHAMBER. INTERNATIONAL JOURNAL OF COMPUTER ENGINEERING AND TECHNOLOGY (IJCET), [S. l.], v. 15, n. 6, p. 2096–2101, 2024. Disponível em: https://openlibindex.com/index.php/IJCET/article/view/1676.. Acesso em: 23 apr. 2026.